Paper Title :Sic as a Promising Material for MEMS/NEMS: A Review

Author :Musaab Zarog

Article Citation :Musaab Zarog , (2017 ) " Sic as a Promising Material for MEMS/NEMS: A Review " , International Journal of Mechanical and Production Engineering (IJMPE) , pp. 84-86, Volume-5,Issue-12

Abstract : SIC has excellent mechanical and electrical properties that make it very promising material/candidate for MEMS/NEMS. This paper highlights some of the SiC properties that makes it more suitable, over conventional Si, for MEMS/NEMS applications. These applications include; high frequency resonators, RF MEMS, electrothermal actuators, and harsh environment applications. The aim of the paper is to review some of the very promising results which demonstrate that SiC as a potential material for each of the aforementioned applications. Keywords – Micro Electromechanical Systems, Electrostatic Actuation, Electro Thermal Actuators, RF MEMS, high frequency, Resonators.

Type : Research paper

Published : Volume-5,Issue-12

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